E ka ikamahanya le maemo a phepelo ea matla a RLS letoto la RF, 'me e sebelisoa haholo ho etching ea plasma, ho roala, ho hloekisa plasma, degumming ea plasma le lits'ebetso tse ling.Ha e sebelisoa e le mong, e ka sebelisoa hammoho le phepelo ea motlakase ea bahlahisi ba bang.