MSB Series Medium Frequency Sputtering Power Supply

Tlhaloso e Khutšoanyane:

RHH letoto la phepelo ea motlakase ea RF e its'etleha ho theknoloji ea tlhahiso ea RF e holileng ho fa bareki phepelo ea motlakase ea RF ka matla a maholo, ho nepahala ho holimo le karabelo e potlakileng.Ka phase e ka seta, pulse controllable, digital tuning le mesebetsi e meng.Libaka tse sebetsang: indasteri ea photovoltaic, indasteri ea pontšo ea liphanele tse bataletseng, indasteri ea semiconductor, indasteri ea lik'hemik'hale, laboratori, lipatlisiso tsa saense, tlhahiso, joalo-joalo.

Mekhoa e sebetsang: plasma e ntlafalitsoeng ea mouoane oa lik'hemik'hale (PECVD), etching ea plasma, ho hloekisa plasma, mohloli oa radio frequency ion, phallo ea plasma, plasma polymerization sputtering, reactive sputtering, joalo-joalo.

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Re romelle lengolo-tsoibila

Likaroloana

● Setaele sa halofo ea litene le rack mount

● Amohela taolo e felletseng ea dijithale, ka lethathamo la lisebelisoa tse bonolo le tse ruileng

● Tokiso ea khafetsa, ho otla ha pelo le ho amahanya ho otla ha pelo

● Ka CEX mokhahlelo oa kamahanyo mosebetsi

● Ts'ireletso e phethahetseng

Lintlha tsa Sehlahisoa

Kenyeletso	Matla a kenang: AC220V±10% 3ΦAC380V±5% (Litlhaloso tse khethehileng li ka etsoa ka mokhoa o ikhethileng)
Kenyeletso	Nako ea ho kenya: 47 ~ 63Hz
Sephetho	Khafetsa ea tlhahiso: 13.56MHz, 27.12MHz, 40.68MHz
	Sebaka sa ho lokisa: ± 5%
	Matla a tsoang: 1.5 ~ 5kW
	Taolo ea matla a tlhahiso: 1 ~ 100%
	Tšitiso ea tlhahiso: 50Ω+j0
	Khokahano ea tlhahiso: mofuta oa N
	Mokhoa oa ho tsoa: ho tsoelapele, ho otla
	Khafetsa ea lebelo: 100Hz ~ 100kHz
	Nako ea mosebetsi: 5 ~ 95%
Lenane la tshebetso	Matla a matla: 0.98
	Ho nepahala ha botsitso ba khafetsa: ±0.005%
	Katleho: 75% (ka tlhahiso e lekantsoeng)
	Harmonic: ~-45dBc
	E kheloha: ＜-50dBc
	Sebopeho sa taolo ea kantle: bongata ba analog, puisano le khokahano
	Mokhoa oa puisano: Sebopeho sa puisano sa RS485 se tloaelehileng;Khetho ea Ether CAT, Ethernet ea indasteri, joalo-joalo.
Tlhokomeliso: sehlahisoa se ntse se tsoela pele ho nchafatsa 'me ts'ebetso e ntse e tsoela pele ho ntlafala.Tlhaloso ena ea paramethara ke ea litšupiso feela.