Phepelo ea matla a microwave ke mofuta o mocha oa phepelo ea motlakase oa microwave o ipapisitseng le theknoloji ea IGBT e phahameng ea frequency inverter.E kopanya phepelo ea motlakase o phahameng oa anode, phepelo ea matla a filament le matla a matla a khoheli (ntle le phepelo ea matla a microwave ea 3kW).Magnetron ea wave e fana ka maemo a ho sebetsa.Sehlahisoa sena se sebelisoa ho MPCVD, microwave plasma etching, microwave plasma degumming le masimo a mang.