Deposition
Fumana temohisiso le ho potlakisa ts'ebetso ea nts'etsopele.
Advanced Energy e fana ka litharollo tsa phepelo ea motlakase le taolo bakeng sa lits'ebetso tsa bohlokoa tsa ho beha lifilimi le lijeometri tsa sesebelisoa.Ho rarolla mathata a ts'ebetso ea li-wafer, litharollo tsa rona tsa ho fetolela matla ka nepo li u lumella ho ntlafatsa ho nepahala ha matla, ho nepahala, lebelo, le ho pheta-pheta ts'ebetso.
Re fana ka mefuta e mengata e fapaneng ea maqhubu a RF, lisebelisoa tsa motlakase tsa DC, maemo a tlhahiso ea matla a ikhethileng, mahlale a tšoanang, le litharollo tsa tlhahlobo ea mocheso oa fiber optic tse u nolofalletsang ho laola tšebetso ea plasma hamolemo.Re boetse re kopanya Fast DAQ™ le phano ea rona ea datha le phihlello ho fana ka temohisiso ea ts'ebetso le ho potlakisa ts'ebetso ea nts'etsopele.
Ithute haholoanyane ka mekhoa ea rona ea ho etsa semiconductor ho fumana tharollo e lumellanang le litlhoko tsa hau.
Phephetso ea Hao
Ho tloha lifiliming tse sebelisetsoang ho etsa mohlala oa litekanyo tse kopantsoeng tsa potoloho ho ea lifiliming tsa conductive le tse sireletsang matla (mehaho ea motlakase), ho ea lifiliming tsa tšepe (ho hokahanya), lits'ebetso tsa hau tsa ho beha li hloka taolo ea boemo ba athomo - eseng feela bakeng sa tšobotsi e 'ngoe le e' ngoe empa ho pholletsa le sephaphatha.
Ka ntle ho sebopeho ka boeona, lifilimi tsa hau tse kentsoeng li tlameha ho ba tsa boleng bo holimo.Ba hloka ho ba le sebopeho se lakatsehang sa lijo-thollo, ho tšoana, le botenya bo lumellanang, 'me ba se ke ba hlola ba e-ba teng - 'me seo se tlatselletsa ho fana ka likhatello tse hlokahalang tsa mochini (tse hatellang le tse thata) le thepa ea motlakase.
Ho rarahana ho ntse ho tsoela pele ho eketseha.Ho sebetsana le mefokolo ea lithography (sub-1X nm node), mekhoa e ikamahanyang e habeli le e mene e hloka hore mokhoa oa hau oa ho bea o hlahise le ho hlahisa paterone holim'a sephaphatha se seng le se seng.
Tharollo ea Rona
Ha o kenya lits'ebetso tsa bohlokoa ka ho fetesisa le lijeometri tsa sesebelisoa, o hloka moetapele ea tšepahalang oa mmaraka.
Phano ea matla a RF ea Advanced Energy's RF le thekenoloji ea lebelo le holimo li u thusa ho itlhophisa le ho ntlafatsa ho nepahala ha matla, ho nepahala, lebelo, le ho pheta-pheta ho hlokahalang bakeng sa lits'ebetso tsohle tse tsoetseng pele tsa PECVD le PEALD.
Sebelisa theknoloji ea rona ea jenereithara ea DC ho lokisa karabelo ea hau ea arc e hlophisehang, ho nepahala ha matla, lebelo, le mokhoa oa ho pheta-pheta o hlokahalang PVD (sputtering) le mekhoa ea ho beha ECD.
Melemo
● Ho tsitsa ha plasma e matlafalitsoeng le ho pheta-pheta ts'ebetso ho eketsa chai
● Phano e nepahetseng ea RF le DC e nang le taolo e felletseng ea dijithale e thusa ho ntlafatsa ts'ebetso e sebetsang hantle
● Karabelo e potlakileng ho liphetoho tsa plasma le tsamaiso ea arc
● Ho otla ha maemo a mangata ho nang le adaptive frequency tuning ho ntlafatsa khetho ea sekhahla
● Tšehetso ea lefats'e e fumaneha ho netefatsa hore nako e holimo le ts'ebetso ea sehlahisoa e sebetsa